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Tokyo Electron (Japan) | Researchclopedia

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Tokyo Electron (Japan)

Tokyocompany

1,898

Works

35,504

Citations

57

h-index

Top Research Topics

Advancements in Photolithography Techniques Semiconductor materials and devices Integrated Circuits and Semiconductor Failure Analysis

Top Researchers

Yoshinori Tokura Tokyo University of Agriculture

1,553 works87,602 citationsh-index: 129

Recent Research

Data-Driven Yield Estimation and Maximization Using Bayesian Optimization Under Uncertainty

Kei Sano,Daiki Kawahito,et al.

20260 citations

Copper Interconnects and Reliability

Electron and X-Ray Spectroscopy Techniques

Plasma Diagnostics and Applications

Advanced Surface Polishing Techniques

3D IC and TSV technologies

Metal and Thin Film Mechanics

Nanofabrication and Lithography Techniques

Silicon and Solar Cell Technologies

Advancements in Semiconductor Devices and Circuit Design

Jun Lin Shanghai Jiao Tong University

1,169 works85,917 citationsh-index: 149

Y. Tokura University of Tsukuba

1,146 works84,463 citationsh-index: 134

Takashi Saito Nagoya City University

586 works40,009 citationsh-index: 100

Peng Wang Qingdao University

1,148 works38,809 citationsh-index: 99

Bo Chen Shenyang Ligong University

786 works37,897 citationsh-index: 98

First-principles exploration of the impact of [Si—C] and [N=C] bonds in SiCN films: Composition, structure, and properties

Tsung-Hsuan Yang,Jianping Zhao,et al.

20260 citations

Monte Carlo simulation of fast neutrals produced and transported in a dual-frequency capacitively coupled Ar/CF <sub>4</sub> plasma sheath

Kazuki Denpoh,Masaaki Matsukuma

20260 citations

Designing pulsed plasma etch processes by genetic algorithm

Patrick Conlin,Shyam Sridhar,et al.

20260 citations

0.55NA EUV contact hole process optimization to enhance depth of focus

Rik Hoefnagels,Jelte van der Valk,et al.

20260 citations

Reduction of carbon impurities in GaN grown by MOCVD using an NH3-plasma source

Hideo Yamada,Tokio Takahashi,et al.

20260 citations