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ASML (United States) | Researchclopedia
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ASML (United States)
Chandler, Arizona
company
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Advanced Surface Polishing Techniques
Industrial Vision Systems and Defect Detection
Optical Coatings and Gratings
Advanced optical system design
3D IC and TSV technologies
Advanced Measurement and Metrology Techniques
Nanofabrication and Lithography Techniques
Surface Roughness and Optical Measurements
Semiconductor materials and devices
Hai Li
Nanjing Tech University
830 works
36,808 citations
h-index: 88
2D inner assist features for 0.55NA: mask and wafer data characterization
Sofia Leitao
,
Parul Dhagat
,
et al.
2025
0 citations