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Fraunhofer Institute for Silicon Technology | Researchclopedia

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Fraunhofer Institute for Silicon Technology

Itzehoe, Schleswig-Holsteinfacility

715

Works

37,965

Citations

83

h-index

Top Research Topics

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Advancements in Photolithography Techniques

Top Researchers

Peter J. Schwartz Yale University

1,063 works101,900 citationsh-index: 148

Recent Research

Characterization of crystallized thick, highly doped PECVD a-Si:H layers for fabrication of surface micromachined MEMS inertial sensors

Yimei Zhang,H-J Quenzer,et al.

20260 citations

Analytical Chemistry and Sensors

3D IC and TSV technologies

Ferroelectric and Piezoelectric Materials

Advanced Surface Polishing Techniques

Mechanical and Optical Resonators

Metal and Thin Film Mechanics

Semiconductor materials and devices

Photonic and Optical Devices

Advanced Sensor and Energy Harvesting Materials

Marco Liserre Hochschule für Angewandte Wissenschaften Kiel

936 works50,621 citationsh-index: 91

Peter Lange University of Copenhagen

819 works36,234 citationsh-index: 94

O. Ambacher University of Freiburg

963 works32,022 citationsh-index: 73

C. B. Schroeder Lawrence Berkeley National Laboratory

808 works16,931 citationsh-index: 52

Lorenz Kienle Interface (United States)

577 works15,565 citationsh-index: 59

Advancing Measurement Capabilities in Lithium-Ion Batteries: Exploring the Potential of Fiber Optic Sensors for Thermal Monitoring of Battery Cells

Florian Krause,Felix E. Schweizer,et al.

20260 citations

Advancing Measurement Capabilities in Lithium-Ion Batteries: Exploring the Potential of Fiber Optic Sensors for Thermal Monitoring of Battery Cells

Florian Krause,Felix E. Schweizer,et al.

20262 citations

Hot viscous glass micromachining on wafer level enabling miniaturized high precision and low roughness concave mirrors for optical cavities

P. Raschdorf,H. -J. Quenzer,et al.

20260 citations

Piezoelectric AlScN based modulator for Si3N4 waveguides

Lena Wysocki,Paul Raschdorf,et al.

20260 citations

A Two-Stage Framework for Optimal Battery Sizing and Reinforcement Learning-Based Energy Management of EV Charging Stations

Qian Xun,Jun-Hyung Jung,et al.

20260 citations