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IMEC | Researchclopedia
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IMEC
Leuven
nonprofit
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Advancements in Photolithography Techniques
Silicon and Solar Cell Technologies
Semiconductor materials and interfaces
3D IC and TSV technologies
Thin-Film Transistor Technologies
Photonic and Optical Devices
Ferroelectric and Negative Capacitance Devices
Copper Interconnects and Reliability
Advanced Memory and Neural Computing
Jean‐Louis Vincent
Université Libre de Bruxelles
2,966 works
268,485 citations
h-index: 201
Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers
Asif A. Shah
,
Gilles Delie
,
et al.
2026
0 citations