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Hitachi High-Tech (Japan) | Researchclopedia
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Hitachi High-Tech (Japan)
Tokyo
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Advanced Electron Microscopy Techniques and Applications
Semiconductor materials and devices
Industrial Vision Systems and Defect Detection
Advanced Materials Characterization Techniques
Plasma Diagnostics and Applications
Advanced Surface Polishing Techniques
Ion-surface interactions and analysis
Force Microscopy Techniques and Applications
Copper Interconnects and Reliability
Kenji Watanabe
National Institute for Materials Science
5,459 works
215,079 citations
h-index: 205
In-line metrology and inspection for hidden structure of lateral gate-all-around devices enabled by high voltage critical dimension scanning electron microscopy
Tomoyasu Shohjoh
,
Miki Isawa
,
et al.
2026
0 citations