Principles of Plasma Discharges and Materials Processing

1. Introduction. 2. Basic Plasma Equations and Equilibrium. 3. Atomic Collisions. 4. Plasma Dynamics. 5. Diffusion and Transport. 6. DC Sheaths. 7. Chemical Reactions and Equilibrium. 8. Molecular Collisions. 9. Chemical Kinetics and Surface Processes. 10. Particle and Energy Balance in Discharges. 11. Capacitive Discharges. 12. Inductive Discharges. 13. Wave-Heated Discharges. 14. DC Discharges. 15. Etching. 16. Deposition and Implantation. 17. Dusty Plasmas. 18. Kinetic Theory of Discharges. Appendix A: Collision Dynamics. Appendix B: The Collision Integral. Appendix C: Diffusion Solutions for Variable Mobility Model.