A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology

199912 citationsJournal Article

Authors

Abstract

A multi-channel heterodyne laser interferometer is proposed for the JPL Thermo-Opto-Mechanical Testbed, which requires the measurement of optical surface deformations at the sub-nanometer level.

Topics & Keywords

Advanced Measurement and Metrology Techniques Optical measurement and interference techniques Surface Roughness and Optical Measurements

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A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology

Authors

Abstract

Topics & Keywords

Publication Details