Deep-ultraviolet transparent conductive β-Ga2O3 thin films

Thin films of β-Ga2O3 with an energy band gap of 4.9 eV were prepared on silica glass substrates by a pulsed-laser deposition method. N-type conductivity up to ∼1 S cm−1 was obtained by Sn-ion doping and deposition under low O2 partial pressure (∼10−5 Pa) at substrate temperatures above 800 °C. The resulting internal transmittance at the wavelength (248 nm) of the KrF excimer laser exceeded 50% for the 100-nm-thick film, making this the most ultraviolet-transparent conductive oxide thin film to date and opening up prospects for applications such as ultraviolet transparent antistatic electric films in ultraviolet lithography.