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Deep Reactive Ion Etching

201569 citationsBook Chapter

Authors

Franz Laermer · Robert Bosch (Germany)

Sami Franssila · Aalto University

Lauri Sainiemi · Microsoft (Finland)

Kai Kolari · Murata (Finland)

Topics & Keywords

Plasma Diagnostics and Applications Electrohydrodynamics and Fluid Dynamics Metal and Thin Film Mechanics

Publication Details

Published in: Elsevier eBooks

DOI: 10.1016/b978-0-323-29965-7.00021-x

Field-Weighted Citation Impact: 20.32

Deep Reactive Ion Etching | Researchclopedia