Physical Basis of Ultrahigh Vacuum

Contents: Molecule-Molecule and Molecule-Interactions. Collision Processes in Gases. Interaction of Charged Particles with Surfaces. Interaction of Radiation with Surfaces. Mechanical Properties of Materials at Very Low Pressures. General Considerations of Pressure Measurement. Total Pressure Gauges. Partial Pressure Gauges. Processing Techniques for Ultrahigh Vacuum. Pumps for Ultrahigh Vacuum. Examples of Ultrahigh Vacuum Systems.