Modeling RF effects in integrated circuits with a new 3D alternating-direction-implicit maxwell equation solver

Alternating-Direction-Implicit (ADI) method is used to solve the Maxwell's equation in ICs, and to overcome the Courant's limit. We have used ADI method to model the Metal-Insulator-Semiconductor-Substrate (MISS) structure. The simulations allowed us to calculate propagation losses, skin depth and dispersion of digital signals on non-ideal interconnects. The simulation results substrate currents and losses that depend on the substrate doping.