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Roll-to-roll hot embossing of microstructures

201058 citationsJournal Article

Authors

Thomas Velten · Fraunhofer Institute for Biomedical Engineering

F. Bauerfeld · Fraunhofer Institute for Biomedical Engineering

H. Schuck · Fraunhofer Institute for Biomedical Engineering

Sabine Scherbaum · Fraunhofer Research Institution for Microsystems and Solid State Technologies

Christof Landesberger · Fraunhofer Society

Karlheinz Bock · Fraunhofer Research Institution for Microsystems and Solid State Technologies

Topics & Keywords

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Microfluidic and Capillary Electrophoresis Applications

Publication Details

Published in: Microsystem Technologies

Volume 17, Issue 4, pp. 619-627

DOI: 10.1007/s00542-010-1158-x

Field-Weighted Citation Impact: 1.51

Roll-to-roll hot embossing of microstructures | Researchclopedia