Micro torque measurement using outer-rotor polysilicon micromotors

Polysilicon surface micromachining using polysilicon for the structural material, silicon nitride or silicon dioxide for electrical isolation, and silicon dioxide for the sacrificial material, has formed the technology base for the development of class of electrostatic micro-actuators. Polysilicon surface micromachining has also been used to implement rotary micromotors. Design and fabrication of outer-rotor micromotors, and micro torque measurement utilizing mechanically-coupled outer-rotor micromotors is presented.