MEMS-based uncooled infrared bolometer arrays: a review

Uncooled infrared bolometer arrays have become the technology of choice for low-cost infrared imaging systems used in applications such as thermography, firefighting, driver night vision, security and surveillance. Uncooled infrared bolometer arrays are reaching performance levels which previously only were possible with cooled infrared photon detectors. With a continuously increasing market volume (> 100 000 units per year to date), the cost for uncooled infrared imaging chips are decreasing accordingly. In this paper we give an overview of the historical development of uncooled infrared bolometer technology and present the most important bolometer performance parameters. The different technology concepts, bolometer design approaches and bolometer materials (including vanadium oxide, amorphous silicon, silicon diodes, silicon-germanium and metals) are discussed in detail. This is followed by an analysis of the current state-of-the-art infrared bolometer technologies, the status of the infrared industry and the latest technology trends.