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Properties of titanium thin films deposited by dc magnetron sputtering

200692 citationsJournal Article

Authors

Y.L. Jeyachandran · Bharathiar University

B. Karunagaran · Bharathiar University

Sa. K. Narayandass · Bharathiar University

D. Mangalaraj · Bharathiar University

Tim Jenkins · University of Wales

Philip Martin · Commonwealth Scientific and Industrial Research Organisation

Topics & Keywords

Metal and Thin Film Mechanics ZnO doping and properties Copper Interconnects and Reliability

Publication Details

Published in: Materials Science and Engineering A

Volume 431, Issue 1-2, pp. 277-284

DOI: 10.1016/j.msea.2006.06.020

Field-Weighted Citation Impact: 7.77

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