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Theoretical aspects of atomic mixing by ion beams

1981508 citationsJournal Article

Authors

Peter Sigmund · Odense University Hospital

A. Gras-Martí · Odense University Hospital

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Silicon and Solar Cell Technologies

Publication Details

Published in: Nuclear Instruments and Methods

Volume 182-183, pp. 25-41

DOI: 10.1016/0029-554x(81)90668-6

Field-Weighted Citation Impact: 40.05

Theoretical aspects of atomic mixing by ion beams | Researchclopedia