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Stress-related effects in thin films

19891,137 citationsJournal Article

Authors

John A. Thornton · University of Illinois Urbana-Champaign

David W. Hoffman · Ford Motor Company (United States)

Topics & Keywords

Metal and Thin Film Mechanics Copper Interconnects and Reliability Diamond and Carbon-based Materials Research

Publication Details

Published in: Thin Solid Films

Volume 171, Issue 1, pp. 5-31

DOI: 10.1016/0040-6090(89)90030-8

Field-Weighted Citation Impact: 35.69

Stress-related effects in thin films | Researchclopedia