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Properties of arc-evaporated CrN and (Cr, Al)N coatings

1991122 citationsJournal Article

Authors

O. Knotek · Institut Wohnen und Umwelt

F. Lo ̈ffler · Institut Wohnen und Umwelt

Herbert Scholl · Institut Wohnen und Umwelt

Topics & Keywords

Metal and Thin Film Mechanics GaN-based semiconductor devices and materials Semiconductor materials and devices

Publication Details

Published in: Surface and Coatings Technology

Volume 45, Issue 1-3, pp. 53-58

DOI: 10.1016/0257-8972(91)90205-b

Field-Weighted Citation Impact: 4.82

Properties of arc-evaporated CrN and (Cr, Al)N coatings | Researchclopedia