Puddle developers for ZEP 7000

19993 citationsJournal Article

Authors

Abstract

We have developed two puddle developers for ZEP7000. These developers are the mixtures of solvents having almost the same boiling points at higher temperature. Developer A and B are vaporized much slower than ZED500. Excellent CD uniformity is expected with them. Developers A and B are a stronger and a milder developers than ZED500, respectively. In this report, we focus on Developer B, taking the request of high resolution into consideration. We report the evaluation results of Developer B in comparison with ZED500.

Topics & Keywords

Advancements in Photolithography Techniques Particle Detector Development and Performance Nuclear reactor physics and engineering

Publication Details

Published in: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Volume 3873, pp. 554-554

DOI: 10.1117/12.373350

Field-Weighted Citation Impact: 1.38

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Puddle developers for ZEP 7000

Authors

Abstract

Topics & Keywords

Publication Details