Hybrid laser—magnetron technology for carbon composite coating

200912 citationsJournal Article

Authors

M. Jelı́nek · Czech Technical University in Prague

T. Kocourek · Czech Academy of Sciences, Institute of Physics

J. Zemek · Czech Academy of Sciences, Institute of Physics

Abstract

Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm2 were prepared. Crystalline TiC films were grown at room substrate temperature.

Topics & Keywords

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research Semiconductor materials and devices

Publication Details

Published in: Laser Physics

Volume 19, Issue 2, pp. 149-153

DOI: 10.1134/s1054660x09020017

Field-Weighted Citation Impact: 1.97

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Hybrid laser—magnetron technology for carbon composite coating

Authors

Abstract

Topics & Keywords

Publication Details