Micro‐Raman Studies on DLC coatings

Abstract Raman scattering is an excellent tool to characterize nanocrystalline clusters and the structural arrangement of carbon atoms in carbon‐based materials. Diamond‐like carbon (DLC) films are used in many industrial applications due to their hardness, wear resistance and biological compatibility. The properties of DLC coatings depend on the carbon coordination and incorporation of other elements, influences onto their Raman spectra will be reviewed.