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High rate reactive sputtering process control

198796 citationsJournal Article

Authors

William D. Sproul · BorgWarner (Brazil)

Topics & Keywords

Metal and Thin Film Mechanics Ion-surface interactions and analysis Semiconductor materials and devices

UN Sustainable Development Goals

Clean water and sanitation

Publication Details

Published in: Surface and Coatings Technology

Volume 33, pp. 73-81

DOI: 10.1016/0257-8972(87)90178-2

Field-Weighted Citation Impact: 8.41

High rate reactive sputtering process control | Researchclopedia