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Modelling the dynamics of a MEMS resonator: Simulations and experiments

2007193 citationsJournal Article

Authors

Rob Mestrom · Eindhoven University of Technology

R.H.B. Fey · Eindhoven University of Technology

J.T.M. van Beek · NXP (Netherlands)

K.L. Phan · NXP (Netherlands)

Henk Nijmeijer · Eindhoven University of Technology

Topics & Keywords

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Acoustic Wave Resonator Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 142, Issue 1, pp. 306-315

DOI: 10.1016/j.sna.2007.04.025

Field-Weighted Citation Impact: 8.21

Modelling the dynamics of a MEMS resonator: Simulations and experiments | Researchclopedia