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Impulse irradiation plasma technology for film deposition | Researchclopedia

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Impulse irradiation plasma technology for film deposition

199954 citationsJournal Article

Authors

А. А. Филиппов

G. V. Khodachenko

А. А. Писарев

Topics & Keywords

Plasma Diagnostics and Applications Electrohydrodynamics and Fluid Dynamics Metal and Thin Film Mechanics

UN Sustainable Development Goals

Clean water and sanitation

Publication Details

Published in: Vacuum

Volume 53, Issue 1-2, pp. 133-136

DOI: 10.1016/s0042-207x(98)00408-4

Field-Weighted Citation Impact: 0.00