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Ion Implantation in Semiconductors

19691,392 citationsBook Chapter

Authors

James W. Mayer · California Institute of Technology

O. J. Marsh · HRL Laboratories (United States)

Topics & Keywords

Silicon and Solar Cell Technologies Integrated Circuits and Semiconductor Failure Analysis Semiconductor materials and devices

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Applied solid state science

DOI: 10.1016/b978-0-12-002901-3.50009-x

Field-Weighted Citation Impact: 120.16

Ion Implantation in Semiconductors | Researchclopedia