Levitation of a micromachined rotor forapplication in a rotating gyroscope

199555 citationsJournal Article

Authors

C. Shearwood · University of Sheffield

C.B. Williams · University of Sheffield

Phil Mellor · University of Sheffield

R.B. Yates · University of Sheffield

M.R.J. Gibbs · Devices for Dignity

A.D. Mattingley · Devices for Dignity

Abstract

The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400 µm diameter, 12 µm thick rotor is levitated to a height of 30 µm.

Topics & Keywords

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Innovative Energy Harvesting Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Electronics Letters

Volume 31, Issue 21, pp. 1845-1846

DOI: 10.1049/el:19951232

Field-Weighted Citation Impact: 2.64