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Properties of fluorinated amorphous diamond like carbon films by PECVD

2003102 citationsJournal Article

Authors

G.Q. Yu · Nanyang Technological University

Beng Kang Tay · Nanyang Technological University

Zhen Sun · Nanyang Technological University

Likun Pan · Nanyang Technological University

Topics & Keywords

Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics Advanced Surface Polishing Techniques

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Applied Surface Science

Volume 219, Issue 3-4, pp. 228-237

DOI: 10.1016/s0169-4332(03)00644-5

Field-Weighted Citation Impact: 3.18

Properties of fluorinated amorphous diamond like carbon films by PECVD | Researchclopedia