Terahertz time-domain spectroscopy of films fabricatedfrom SU-8

Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1–1.6 THz. At a frequency of 1 THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3 × 10–6, respectively.