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Dislocations in Si generated by fatigue at room temperature

200116 citationsJournal Article

Authors

H. Saka · Nagoya University

Topics & Keywords

Silicon and Solar Cell Technologies Integrated Circuits and Semiconductor Failure Analysis Semiconductor materials and interfaces

Publication Details

Published in: Materials Science in Semiconductor Processing

Volume 4, Issue 1-3, pp. 113-115

DOI: 10.1016/s1369-8001(00)00128-1

Field-Weighted Citation Impact: 0.87

Dislocations in Si generated by fatigue at room temperature | Researchclopedia