Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors

20041,994 citationsJournal Article

Authors

Qing Wan · Institute of Physics

Q. H. Li · Institute of Physics

Yujin Chen · Institute of Physics

T. H. Wang · Institute of Physics

Xiaobo He · Institute of Electronics

J. P. Li · Chinese Academy of Sciences

Chuan Lin · Shanghai Institute of Microsystem and Information Technology

Abstract

Based on the achievement of synthesis of ZnO nanowires in mass production, ZnO nanowires gas sensors were fabricated with microelectromechanical system technology and ethanol-sensing characteristics were investigated. The sensor exhibited high sensitivity and fast response to ethanol gas at a work temperature of 300 °C. Our results demonstrate the potential application of ZnO nanowires for fabricating highly sensitive gas sensors.

Topics & Keywords

Gas Sensing Nanomaterials and Sensors ZnO doping and properties Acoustic Wave Resonator Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Applied Physics Letters

Volume 84, Issue 18, pp. 3654-3656

DOI: 10.1063/1.1738932

Field-Weighted Citation Impact: 71.27