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RBS characterization of iridium silicides formed by RTA in vacuum

199610 citationsJournal Article

Authors

T. Rodrı́guez · Universidad Politécnica de Madrid

A. Almendra · Universidad Politécnica de Madrid

A. Rodrı́guez · Universidad Politécnica de Madrid

J. Sanz-Maudes · Universidad Politécnica de Madrid

Topics & Keywords

Semiconductor materials and interfaces Intermetallics and Advanced Alloy Properties Silicon and Solar Cell Technologies

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 113, Issue 1-4, pp. 279-283

DOI: 10.1016/0168-583x(95)01411-x

Field-Weighted Citation Impact: 0.78

RBS characterization of iridium silicides formed by RTA in vacuum | Researchclopedia