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AES and XPS study of thin RF-sputtered Ta2O5 layers

1995197 citationsJournal Article

Authors

E. Atanassova · Bulgarian Academy of Sciences

T. Dimitrova · Bulgarian Academy of Sciences

J. Koprinarova · Georgi Nadjakov Institute of Solid State Physics

Topics & Keywords

Semiconductor materials and devices Metal and Thin Film Mechanics Ion-surface interactions and analysis

UN Sustainable Development Goals

Clean water and sanitation

Publication Details

Published in: Applied Surface Science

Volume 84, Issue 2, pp. 193-202

DOI: 10.1016/0169-4332(94)00538-9

Field-Weighted Citation Impact: 3.17

AES and XPS study of thin RF-sputtered Ta2O5 layers | Researchclopedia