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Megasonic agitation for enhanced electrodeposition of copper

200930 citationsJournal Article

Authors

Jens Georg Kaufmann · Heriot-Watt University

Marc P. Y. Desmulliez · Heriot-Watt University

Yingtao Tian · Loughborough University

Dennis Price · Merlin Circuit Technology (United Kingdom)

Michael Hughes · University of Greenwich

Nadia Strusevich · University of Greenwich

Topics & Keywords

Microfluidic and Bio-sensing Technologies Fluid Dynamics and Thin Films Modular Robots and Swarm Intelligence

Publication Details

Published in: Microsystem Technologies

Volume 15, Issue 8, pp. 1245-1254

DOI: 10.1007/s00542-009-0886-2

Field-Weighted Citation Impact: 1.37

Megasonic agitation for enhanced electrodeposition of copper | Researchclopedia

University of Greenwich

Changqing Liu · Loughborough University

David A. Hutt · Loughborough University