Development of low noise cantilever deflection sensor for multienvironment frequency-modulation atomic force microscopy

We have developed a low noise cantilever deflection sensor with a deflection noise density of 17fm∕Hz by optimizing the parameters used in optical beam deflection (OBD) method. Using this sensor, we have developed a multienvironment frequency-modulation atomic force microscope (FM-AFM) that can achieve true molecular resolution in various environments such as in moderate vacuum, air, and liquid. The low noise characteristic of the deflection sensor makes it possible to obtain a maximum frequency sensitivity limited by the thermal Brownian motion of the cantilever in every environment. In this paper, the major noise sources in OBD method are discussed in both theoretical and experimental aspects. The excellent noise performance of the deflection sensor is demonstrated in deflection and frequency measurements. True molecular-resolution FM-AFM images of a polydiacetylene single crystal taken in vacuum, air, and water are presented.