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Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering

201081 citationsJournal Article

Authors

M. Keunecke · Fraunhofer Institute for Surface Engineering and Thin Films

Christian Stein · Fraunhofer Institute for Surface Engineering and Thin Films

K. Bewilogua · Fraunhofer Institute for Surface Engineering and Thin Films

W. Koelker · CemeCon (Germany)

D. Kassel · Kennametal (Germany)

Henk van den Berg · Kennametal (Germany)

Topics & Keywords

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research GaN-based semiconductor devices and materials

Publication Details

Published in: Surface and Coatings Technology

Volume 205, Issue 5, pp. 1273-1278

DOI: 10.1016/j.surfcoat.2010.09.023

Field-Weighted Citation Impact: 7.70

Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering | Researchclopedia