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Deposition of TiN, TiC, and TiO2 films by filtered arc evaporation

199196 citationsJournal Article

Authors

Peter Martin · Commonwealth Scientific and Industrial Research Organisation

R. P. Netterfield · Commonwealth Scientific and Industrial Research Organisation

T.J. Kinder · Commonwealth Scientific and Industrial Research Organisation

L. Descôtes · Technicolor (France)

Topics & Keywords

Metal and Thin Film Mechanics Semiconductor materials and devices Copper Interconnects and Reliability

UN Sustainable Development Goals

Clean water and sanitation

Publication Details

Published in: Surface and Coatings Technology

Volume 49, Issue 1-3, pp. 239-243

DOI: 10.1016/0257-8972(91)90062-2

Field-Weighted Citation Impact: 7.58

Deposition of TiN, TiC, and TiO2 films by filtered arc evaporation | Researchclopedia