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Deposition of high quality TiN films by excimer laser ablation in reactive gas
1993
54 citations
Journal Article
Field-Weighted Citation Impact:
14.28
Deposition of high quality TiN films by excimer laser ablation in reactive gas | Researchclopedia
·
Institute for Nuclear Research Pitesti
Andrei Barborică
·
University of Bucharest
A. Luches
·
Innovation Engineering (Italy)
Maria Luisa De Giorgi
·
Innovation Engineering (Italy)
A. Perrone
·
Innovation Engineering (Italy)
B. Dubreuil
·
Université d'Orléans
Jörg Hermann
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Université d'Orléans