Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors

This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine (VOPc) as the active material. The devices, which comprise three different thicknesses, have been fabricated using the thermal evaporation technique. A thin film of VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes. The capacitive effect of the samples under humidity has been investigated. Comparison of the samples with different thicknesses shows that the thinnest device seems more sensitive towards humidity. The humidity dependent capacitance properties of the sensor make it beneficial for use in commercial hygrometers.