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A hollow stiffening structure for low-pressure sensors

201058 citationsJournal Article

Authors

Peter Kinnell · Inspection Technologies (United Kingdom)

J. King · Inspection Technologies (United Kingdom)

M. Lester · Inspection Technologies (United Kingdom)

R. Craddock · Inspection Technologies (United Kingdom)

Topics & Keywords

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Force Microscopy Techniques and Applications

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 160, Issue 1-2, pp. 35-41

DOI: 10.1016/j.sna.2010.03.024

Field-Weighted Citation Impact: 0.29

A hollow stiffening structure for low-pressure sensors | Researchclopedia