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Initial fabrication of a micro-induction gyroscope

199632 citationsJournal Article

Authors

C.B. Williams · University of Sheffield

C. Shearwood · University of Sheffield

Phil Mellor · University of Sheffield

A.D. Mattingley · University of Sheffield

M.R.J. Gibbs · University of Sheffield

R.B. Yates · University of Sheffield

Topics & Keywords

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Advanced Antenna and Metasurface Technologies

Publication Details

Published in: Microelectronic Engineering

Volume 30, Issue 1-4, pp. 531-534

DOI: 10.1016/0167-9317(95)00302-9

Field-Weighted Citation Impact: 1.64

Initial fabrication of a micro-induction gyroscope | Researchclopedia