Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

Back to research

Conduction in thin dielectric films

1971487 citationsJournal Article

Authors

J.G. Simmons · University of Toronto

Abstract

Conduction through thin dielectric films sandwiched between metal and semiconductor electrodes is reviewed.

Topics & Keywords

Semiconductor materials and devices Surface and Thin Film Phenomena Copper Interconnects and Reliability

Publication Details

Published in: Journal of Physics D Applied Physics

Volume 4, Issue 5, pp. 613-657

DOI: 10.1088/0022-3727/4/5/202

Field-Weighted Citation Impact: 11.20

Conduction in thin dielectric films | Researchclopedia