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Backside Sims Study Of Ge/Pd Non-Alloyed Ohmic Contacts On InGaAs

19942 citationsJournal Article

Authors

S. A. Schwarz · Queens College, CUNY

C.J. Pahnstrom · University of Minnesota

L.C. Wang · Texas A&M University

M.H. Park · Texas A&M University

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Semiconductor materials and devices

UN Sustainable Development Goals

Life below water

Publication Details

Published in: MRS Proceedings

Volume 354

DOI: 10.1557/proc-354-471

Field-Weighted Citation Impact: 0.55

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