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Handbook of Thin Film Technology

19712,765 citationsJournal Article

Authors

Paul P. Budenstein

Topics & Keywords

Semiconductor materials and devices Copper Interconnects and Reliability Optical Coatings and Gratings

Publication Details

Published in: Journal of The Electrochemical Society

Volume 118, Issue 4, pp. 114C-114C

DOI: 10.1149/1.2408101

Field-Weighted Citation Impact: 68.03

Handbook of Thin Film Technology | Researchclopedia