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Phase composition and conductivity of sputtered tantalum | Researchclopedia

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Phase composition and conductivity of sputtered tantalum

197054 citationsJournal Article

Authors

F.C. Livermore · CMC Microsystems (Canada)

Topics & Keywords

Metal and Thin Film Mechanics Advanced materials and composites Copper Interconnects and Reliability

Publication Details

Published in: Thin Solid Films

Volume 5, Issue 5-6, pp. 407-420

DOI: 10.1016/0040-6090(70)90112-4

Field-Weighted Citation Impact: 23.93