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Some effects of oxygen impurities on AlN and GaN

2002406 citationsJournal Article

Authors

Glen A. Slack · Rensselaer Polytechnic Institute

L. J. Schowalter · Rensselaer Polytechnic Institute

Donald T. Morelli · Aptiv (United States)

Jaime A. Freitas · United States Naval Research Laboratory

Topics & Keywords

GaN-based semiconductor devices and materials Acoustic Wave Resonator Technologies Plasma Diagnostics and Applications

Publication Details

Published in: Journal of Crystal Growth

Volume 246, Issue 3-4, pp. 287-298

DOI: 10.1016/s0022-0248(02)01753-0

Field-Weighted Citation Impact: 11.13

Some effects of oxygen impurities on AlN and GaN | Researchclopedia