Temporal behavior of modulated optical reflectance in silicon

1987124 citationsJournal Article

Authors

Jon Opsal · Thermal Wave Imaging (United States)

Michael W. Taylor · Thermal Wave Imaging (United States)

William L. Smith · Thermal Wave Imaging (United States)

Allan Rosencwaig · Thermal Wave Imaging (United States)

Abstract

We report on the results of a study of the temporal behavior of the laser-induced modulated optical reflectance from the surfaces of crystalline silicon wafers, epitaxial silicon films, and ion implanted but unannealed silicon wafers. The observed temporal behavior of this signal appears to be associated with the presence and temporal evolution of electronic surface states.

Topics & Keywords

Laser Material Processing Techniques Thin-Film Transistor Technologies Silicon Nanostructures and Photoluminescence

Publication Details

Published in: Journal of Applied Physics

Volume 61, Issue 1, pp. 240-248

DOI: 10.1063/1.338863

Field-Weighted Citation Impact: 14.13

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Temporal behavior of modulated optical reflectance in silicon

Authors

Abstract

Topics & Keywords

Publication Details