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Process Integration for active polysilicon resonant microstructures

198953 citationsJournal Articlegreen Open Access

Authors

Michael W. Putty · General Motors (United States)

Shih−Chia Chang · General Motors (United States)

Roger T. Howe · University of California, Berkeley

Andrew Robinson · Integrated Sensors (United States)

K.D. Wise · Integrated Sensors (United States)

Topics & Keywords

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Mechanical and Optical Resonators

Publication Details

Published in: Sensors and Actuators

Volume 20, Issue 1-2, pp. 143-151

DOI: 10.1016/0250-6874(89)87112-4

Field-Weighted Citation Impact: 6.44

Process Integration for active polysilicon resonant microstructures | Researchclopedia