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Ion cluster beam deposition of thin films

199167 citationsJournal Article

Authors

W. L. Brown · AT&T (United States)

Martin F. Jarrold · AT&T (United States)

R. L. McEachern · AT&T (United States)

M. Sosnowski · New Jersey Institute of Technology

Gikan H. Takaoka · Kyoto University

Hideyuki Usui · Kyoto University

Topics & Keywords

Ion-surface interactions and analysis nanoparticles nucleation surface interactions Advanced Chemical Physics Studies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 59-60, pp. 182-189

DOI: 10.1016/0168-583x(91)95202-o

Field-Weighted Citation Impact: 8.41

Ion cluster beam deposition of thin films | Researchclopedia

Kyoto University