Mechanical properties of AIN/Si structures under conditions of low-flux beta irradiations

20102 citationsJournal Article

Authors

A. A. Dmitrievskiy · Tambov State University

N. Yu. Efremova · Tambov State University

E. M. Vihlyaeva · Tambov State University

В. В. Коренков · Tambov State University

А. В. Шуклинов · Tambov State University

M. Badylevich · KU Leuven

Yu. Fedorenko ·

Abstract

The mechanical properties of AIN/Si structures under conditions of beta irradiation with fluence F = 3.6 × 1010 cm−2 were investigated by the dynamic micro- and nanoindentation methods. A beta-induced increase in radial cracks in the area of indentor imprints was discovered.

Topics & Keywords

GaN-based semiconductor devices and materials Metal and Thin Film Mechanics Ion-surface interactions and analysis

Publication Details

Published in: Bulletin of the Russian Academy of Sciences Physics

Volume 74, Issue 2, pp. 209-212

DOI: 10.3103/s1062873810020231

Field-Weighted Citation Impact: 0.28

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Mechanical properties of AIN/Si structures under conditions of low-flux beta irradiations

Authors

Abstract

Topics & Keywords

Publication Details