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Concepts for creating ultra-deep trenches using deep X-ray lithography

200012 citationsJournal Article

Authors

Yao Cheng · National Synchrotron Radiation Research Center

B.-Y. Shew · National Synchrotron Radiation Research Center

Che‐Hsin Lin · National Synchrotron Radiation Research Center

Minking K. Chyu · Carnegie Mellon University

Topics & Keywords

Advancements in Photolithography Techniques Advanced X-ray Imaging Techniques Advanced Surface Polishing Techniques

Publication Details

Published in: Sensors and Actuators A Physical

Volume 82, Issue 1-3, pp. 205-209

DOI: 10.1016/s0924-4247(99)00333-7

Field-Weighted Citation Impact: 1.83

Concepts for creating ultra-deep trenches using deep X-ray lithography | Researchclopedia